刘学杰;诸葛晨昱;王宇晨;

• 1:内蒙古科技大学机械工程学院

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摘要(Abstract)：

研究中以醋酸铈为前驱体,采用微波等离子化学气相沉积(MPCVD)工艺制备了Ce掺杂的CVD金刚石薄膜.采用扫描电镜(SEM)、X射线衍射(XRD)和拉曼检测,系统地研究了Ce掺杂对金刚石膜的形貌和微观结构的影响.扫描电镜(SEM)检测结果揭示了Ce掺杂可以使薄膜表面生长更多的微米金刚石方晶.X射线衍射(XRD)检测结果表明:Ce的加入可以改变金刚石薄膜中晶粒的择优取向.拉曼(Raman)检测结果显示:当Ce掺杂的通量为0,30,45,60 sccm时,对薄膜中金刚石峰的半高宽值分别为10,18,13,9.研究结果表明:适当的Ce掺杂可以提高薄膜中金刚石的结晶质量.

关键词(KeyWords)： Ce掺杂金刚石薄膜;微波等离子气相沉积;微结构;择优取向;结晶质量

基金项目(Foundation): 国家自然科学基金资助项目(51562031;61765012);; 内蒙古自治区自然科学基金资助项目(2014MS0516;2015MS0550);; 包头市科学技术基金资助项目(2013J2001-1)

作者(Author): 刘学杰;诸葛晨昱;王宇晨;

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DOI:

参考文献(References)：

• [1] MAY P W.Diamond thin films:a 21st-century material[J].Philosophical Transactions of the Royal Society London,Series A,(Mathematical,Physical and Engineering Sciences),2000,358(1766):473.

• [2] KALISH R.Diamond as a unique high-tech electronic material:difficulties and prospects[J].Journal of Physics D:Applied Physics,2007,40(20):6467.

• [3] DOLMATOV V Y,BURKAT G K,MYLLUM V,et al.Electrochemical chromium-diamond coating[J].Journal of Superhard Materials,2015,37(2):82.

• [4] EKIMOV E A,ZIBROV I P,MALYKHIN S A,et al.Synthesis of diamond in double carbon-rare earth element systems[J].Materials Letters,2017,193(Complete):130.

• [5] ZHANG Z,ZHOU H,GUO D,et al.Optical characterization of hydrogen-free CeO2 doped DLC films deposited by unbalanced magnetron sputtering[J].Applied Surface Science,2008,255(5-part-P2):2655.

• [6] WU Y M,ZHOU S G,ZHAO W J,et al.Comparative corrosion resistance properties between (Cu,Ce)-DLC and Ti co-doped (Cu,Ce)/Ti-DLC films prepared via magnetron sputtering method[J].Chemical Physics Letters,2018,705:50.

• [7] LIU X J,QIAO H M,KANG C J,et al.Adsorption and migration behavior of Si atoms on the hydrogen-terminated diamond (001) surface:A first principles study[J].Applied Surface Science,2017,420:542.

• [8] LIU X J,KANG C J,QIAO H M,et al.Theoretical studies of the adsorption and migration behavior of boron atoms on hydrogen-terminated diamond (001) Surface[J].Coatings,2017,7(5):57.

• [9] LIU X J,LUO H,QIAO H M,et al.Theoretical study of the migration behaviour of Y-C atoms on diamond (001) surface[J].Diamond and Related Materials,2016,61:102.

• [10] LIU X J,LI W,RE Y,et al.Adsorption and migration behaviours of Nb-C atoms on clean diamond (001) surface:A first principles study[J].Computational Materials Science,2016,121:159.

• [11] LIU X,WANG H,et al.First principles calculations of the adsorption and migration behaviors of N atoms on the H-terminated diamond (001) surface[J],Applied Surface Science,2019,463:668.

• [12] LIU X J,WU Y Z,SUN H F,et al.Adsorption and migration of selenium atoms on a hydrogen-terminated diamond (001) surface:A first-principles study[J].Computational Materials Science,2019,162:186.

• [13] LIU X J,SUN H F,WU Y Z,et al.Theoretical study of sulphur atoms’adsorption and migration behaviours on diamond (001) surface [J].Coatings,2019,9(3),184.

• [14] LIU X J,WANG H C,LU P F,et al.Effect of the N/C ratios of ammonia added to process gas mixtures on the morphology and structure of MPCVD diamond films[J].Coatings,2018,(8):163.

• [15] LIU X J,LU P F,WANG H C,et al.Morphology and structure of Ti-doped diamond films prepared by microwave plasma chemical vapor deposition[J].Applied Surface Science,2018,442,529.

• [16] 刘学杰,王宇晨,陆鹏飞,等.铈掺杂金刚石薄膜的研究[J].河南科技大学学报(自然科学版),2018,(6):13.

• [17] LIU X J,WANG W,ZHANG H L,et al.La-doped diamond films prepared through microwave plasma chemical vapor deposition[J].Thin Solid Films,2019,692,137620.

• [18] VICKERMAN J C.Book review:Secondary ion mass spectrometry-basic concepts,instrumental aspects,applications and trends (written by BENNINGHOVEN A,et al.,and published by Wiley in 1987)[J].Surface & Interface Analysis,10(8):435.

• [19] ULLAH M,AHMED E,WELCH K,et al.Growth of nitrogen-incorporated diamond films using hot-filament chemical vapor deposition technique[J].Advanced Science Letters,2013,19(1):291.

• [20] FERRARI,A,ROBERTSON,J.Interpretation of Raman spectra of disordered and amorphous carbon[J].Physical Review B,2000,61(20):14095.

• [21] LYON S A.Biegelsen,Microstrain in laser-crystallized silicon islands on fused silica[J].Applied Physics Letters,1982,40(4):316.

• [22] STUART S A,PRAWWER S,WEISER P S.Growth-sector dependence of fine structure in the first-order Raman diamond line from large isolated chemical-vapor-deposited diamond crystals[J].Applied Physics Letters,1993,62(11):1227.

• [23] FAN Q H,FEMANDES A,PEREIRA E.Stress-relief behavior in chemical-vapor-deposited diamond films[J].Journal of Applied Physics,1998,84(6):3155.

• [24] YOSHIKAWA M,KATAGIRI G,ISHIDA H I,ISHITANI A,ONO M.Matsumura,Characterization of crystalline quality of diamond films by Raman spectroscopy[J].Applied Physics Letters,1989,55(25):2608.

• [25] AGER J W,DRORY M D.Quantitative measurement of residual biaxial stress by Raman spectroscopy in diamond grown on a Ti alloy by chemical vapor deposition[J].Physical Review B,1993,48(4):2601.

• [26] NASIEKA I,STRELCHUK V,BOYKO M,et al.Raman and photoluminescence characterization of diamond films for radiation detectors[J].Sensors and Actuators A:Physical,2015,223:18.

• [27] KLAUSER F,STEINMULLER-NETHL D,et al.Raman studies of nano-and ultra-nanocrystalline diamond films grown by hot-filament CVD[J].Chemical Vapor Deposition,2010,16(4-6):127.