16 铈掺杂对CVD金刚石薄膜结构的影响

刘学杰;诸葛晨昱;王宇晨;

• 1:内蒙古科技大学机械工程学院

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摘要(Abstract)：

研究中以醋酸铈为前驱体,采用微波等离子化学气相沉积(MPCVD)工艺制备了Ce掺杂的CVD金刚石薄膜.采用扫描电镜(SEM)、X射线衍射(XRD)和拉曼检测,系统地研究了Ce掺杂对金刚石膜的形貌和微观结构的影响.扫描电镜(SEM)检测结果揭示了Ce掺杂可以使薄膜表面生长更多的微米金刚石方晶.X射线衍射(XRD)检测结果表明:Ce的加入可以改变金刚石薄膜中晶粒的择优取向.拉曼(Raman)检测结果显示:当Ce掺杂的通量为0,30,45,60 sccm时,对薄膜中金刚石峰的半高宽值分别为10,18,13,9.研究结果表明:适当的Ce掺杂可以提高薄膜中金刚石的结晶质量.

关键词(KeyWords)： Ce掺杂金刚石薄膜;微波等离子气相沉积;微结构;择优取向;结晶质量

基金项目(Foundation): 国家自然科学基金资助项目(51562031;61765012);; 内蒙古自治区自然科学基金资助项目(2014MS0516;2015MS0550);; 包头市科学技术基金资助项目(2013J2001-1)

作者(Author): 刘学杰;诸葛晨昱;王宇晨;

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DOI:

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