15.Study on the determination of effective silicon content incold hydrogenation discharged silicon powder

Abstract:

In the process of cold hydrogenation of polysilicon，there will be unreacted silicon powder． In order to further optimize theproduction process，it is necessary to detect the effective silicon content in it． With the cold hydrogenation of the exhausted silicon pow-der as the raw material，the hydrogen chloride gas as the reaction gas，the reaction is carried out with the exhausted silicon powdersample under the high temperature condition in the tubular furnace． The mass of sample reduced after the reaction is the effective sili-con content in the efflux silicon powder． The effective silicon content in the efflux silicon powder samples of different batches was detec-ted，and the detection results showed that the ＲSD was less than 0． 5% ，and the recovery rate was 94． 7% － 103． 2% ． The detectionmethod in this study can more accurately and visually detect the effective silicon content in the efflux silicon powder by direct reactionbetween hydrogen chloride gas and efflux silicon powder．

Keywords: discharged silicon powder; effective silicon; tubular furnace; hydrogen chloride